Sputter Coater Instructions
PELCO SC-7
Setting Sputter Current and Coating Time
- Lift lid (tilt it back all the way). Using gloves or forceps, insert sample on sample table (remove glass cylinder, if necessary).
- Close lid firmly and turn power switch on. The unit will automatically be in AUTO mode and the pump will begin evacuating sample chamber. Allow to pump for at least 5 minutes (or until P 2 0.01 mb) before coating sample.
- While waiting for pressure to drop, open argon source, set regulator to 5 psi, and open valve about a quarter turn. If necessary, adjust sputter current and coating time (below).
Coating the Sample:
- Make sure AUTO button is selected (this is the default setting when the instrument is powered up).
- When P 2 0.01 mb, push CYCLE. The sputter coater will automatically cycle through
the following activities:
- Pump to 0.05 mb
- Open argon flush valve for 3 seconds, then close
- Pump to 0.15 mb
- Open argon flush valve for 3 seconds, then close
- Pump to 0.15 mb and continue pumping for an additional 20 sec
- Switch on sputter supply at preselected current
- Switch off sputter supply after preselected time
- Push MANUAL button to select.
- When P 2 0.01 mb, push FLUSH (P should increase). After 3-5 sec, push LEAK (shuts off FLUSH automatically). P should decrease and stabilize to 0.08 mb. If the P differs significantly from 0.08 mb, adjust using NEEDLE VALVE ADJUSTMENT knob on rear of instrument.
- Repeat #2.
- With LEAK still selected, push START. Sputter supply will automatically switch off after pre selected time.
- Shut off main power. Pump will shut off and sample chamber will vent to atmosphere. Open lid (tilt back).
- Using gloves or forceps, remove sample.
- Remove glass cylinder. In fume hood, wipe out the inside of the cylinder using a small amount of methanol and Kimwipes (in hood).
- After the glass cylinder is dry, replace and close lid.
- Shut off argon source.
Setting Sputter Current and Coating Time:
The coating thickness is a function of four factors:
- Sputter current
- Gas pressure
- Working distance from source
- Coating time
(will provide a Au/Pd coating thickness of ~20 nm):
Sputter current = 40 mA
Coating time = 15 sec
Argon leak pressure = 0.08 mb
Working distance = 33-40 mm (33 mm table top to bottom of Al target holder; 40 mm to Au/Pd foil)
The easiest variables to change for customization of coating thickness are sputter current and coating time. These settings can be changed as follows:
Sputter current: Push and hold SET mA button while adjusting current using SET arrow keys. Choices: 10 mA, 20 mA, 30 mA, 40 mA.
Coating time: In AUTO mode, push and hold PAUSE/TEST button while adjusting time (in sec) using SET arrow keys.
View instructions for the SEM
